Ȩ > Á¦Ç°Á¤º¸ > ¹ÝµµÃ¼Àåºñ > ÀÚµ¿È­½Ã½ºÅÛ > Laser Mark Reader

 
 
 
 


 
Laser Mark Reader is...
   Laser Mark Reader´Â HostÀÇ ¸í·É¿¡ µû¶ó WaferÀÇ ID¸¦
ÆǺ°ÇÏ¿© ¿øÇÏ´Â À§Ä¡ÀÇ FOUPÀ¸·Î Wafer¸¦ ÀÌÀçÇÏ´Â
ÀåÄ¡ÀÌ´Ù.
 


* Features
- IDÀÇ Marking À§Ä¡¿¡ (Front Side, Back Side, Angle) ±¸¾Ö¹ÞÁö ¾Ê°í ÀÐÀ» ¼ö ÀÖ°Ô Çϱâ À§ÇØ
  OCR ModuleÀ» 3ÃàÀ¸·Î À̵¿µÇµµ·Ï FlexibleÇÏ°Ô ¼³°è.
- ºü¸£°í Á¤È®ÇÑ OCR ±â´ÉÀ» ±â¹ÝÀ¸·Î Mixing lot °ËÃâ, Laser Marking½Ã Character Missing ¿©ºÎ °ËÃâ
  CharacterÀÇ ½ÉÇÑ ÈѼտ¡ ÀÇÇÑ OCR ½ÇÆÐ µîÀ» °ËÃâ °¡´É.
- »ç¿ëÀÚ°¡ ½±°Ô »ç¿ëÇÒ ¼ö ÀÖ´Â GUI·Î ±¸¼ºµÇ¸ç, °¢Á¾ Error Logging ¹× Self Diagnosis¿¡ ÀÇÇÑ
  Error °ËÃâÀ» ÇÒ ¼ö ÀÖÀ¸¸ç Error ¹ß»ý ½Ã Operator¿¡°Ô Case º°·Î ÀûÀýÇÑ ´ëÀÀ ¹æ¹ýÀ» Screen »ó¿¡
  Á¦½ÃÇÔÀ¸·Î½á ½Å¼ÓÇÏ°Ô ÀÛ¾÷À¸·ÎÀÇ º¹±Í°¡ °¡´É.
- °¢ ºÎºÐ ÇÙ½É ModuleÀ» ÀÌ·Â °ü¸®ÇÔÀ¸·Î½á ¹®Á¦ ¹ß»ý ½Ã ÃßÀûÀÌ °¡´É.
- CompactÇÑ Moving Pass¸¦ ±¸¼ºÇÔÀ¸·Î½á ThroughputÀÌ ±Ø´ëÈ­ µÇµµ·Ï ¼³°è.
- SEMI Standard ¹× »ç¿ëÀÚÀÇ ¾ÈÁ¤¼ºÀ» °í·ÁÇÑ Compact Load / Unlaod Port äÅÃ.
- Mini-environment¸¦ ¼³Ä¡ÇÔÀ¸·Î½á Class 10ÀÇ È¯º®ÇÑ Particle control °¡´É.
- ESD(Electro static discharge)·ÎºÎÅÍÀÇ ¾ÈÀü¼ºÀ» °í·ÁÇÑ ¼³°è.



* System Specification
Description
Specification
Dimension (W x D x H)
    1439 x 1204 x 1850mm
Utility
    Electric Power
    1P, 220V/60Hz, 2.5Kw
    Vacuum
    £¾500mmHg
    Air Pressure
    £¾ 5 Bar
    Handling Wafer
    12¡±
    Throughput
    £¾106 Wafers/Hr
    Lord/Unload Port
    FOUP Opener : 2Ports
    Transfer Robot
    Edge Grip & Single Arm Type 4Ãà Robot : 1´ë
    OCR     Cognex»ç In-Sight 1701 : 2´ë (Front / Back Side)
    BCR

    FOUP Opener : Keyence BL-601HASO(7099)
    Manual¿ë Handy Barcode Reader : 1´ë

    Pre Aligner
    Edge Grip Type : 1´ë
    Buffer Arm
    Edge Grip Type : 1´ë
Performance
    Environment
    FFU / lonizer bar
    Cleanliness : Class 10 @ 0.1§­
    Host Communication
    TCP/IP Port and SECS/GEM for Host Grading



* S/W Configuration
 

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